Power semiconductor device having high breakdown voltage, low on-resistance and small switching loss and method of forming the same

ABSTRACT

In accordance with one embodiment of the present invention, a power semiconductor device includes a first drift region of a first conductivity type extending over a semiconductor substrate. The first drift region has a lower impurity concentration than the semiconductor substrate. A second drift region of the first conductivity type extends over the first drift region, and has a higher impurity concentration than the first drift region. A plurality of stripe-shaped body regions of a second conductivity type are formed in an upper portion of the second drift region. A third region of the first conductivity type is formed in an upper portion of each body region so as to form a channel region in each body region between the third region and the second drift region. A gate electrode laterally extends over but is insulated from: (i) the channel region in each body region, (ii) a surface area of the second drift region between adjacent stripes of body regions, and (iii) a surface portion of each source region.

CROSS-REFERENCES TO RELATED APPLICATIONS

This application claims priority from Korean Patent Application No.2002-34141, filed on Jun. 18, 2002, in the Korean Intellectual PropertyOffice, and U.S. patent application Ser. No. 10/464,059, filed Jun. 17,2003, both of which are incorporated by reference.

BACKGROUND

The present invention relates in general to semiconductor technology,and more particularly to power semiconductor devices having highbreakdown voltage, low on-resistance, and small switching loss.

A power semiconductor device such as a power metal oxide semiconductorfield effect transistor (MOSFET) is required to have high breakdownvoltage, low on-resistance, and small switching loss. FIG. 1 is a layoutview of a conventional power MOSFET, and FIG. 2 is a sectional viewtaken along line A-A′ in FIG. 1. In FIGS. 1 and 2, like references areused to refer to like regions, layers, or portions throughout. In FIG.1, a plurality of hexagonal unit cells 100 are spaced-apart from oneanother by a predetermined distance d so as to obtain an optimumbreakdown voltage and on-resistance. The predetermined distance dbetween the hexagonal unit cells 100 is the same as a width d of a gateelectrode 118. Each of hexagonal unit cells 100 has a source region 108of n⁺-type conductivity which is overlapped by gate electrode 118 andsource electrode 120.

In FIG. 2, an n⁻-type drift region 104 extends over an n⁺-type drainregion 102. Body regions 106 of p⁻-type conductivity are formed in anupper portion of n⁻-type drift region 104. Source regions 108 of n⁺-typeconductivity are formed in an upper portion of p⁻-type body regions 106.Highly-doped regions 110 of p⁺-type conductivity are formed in p⁻-typebody regions 106, and extend from a surface area of body regions 106between source regions 108 to a depth terminating in drift region 104.Highly-doped region 112 of n⁺-type conductivity is formed in an upperpotion of n⁻-type drift region 104 between p⁻-type body regions 106.Highly doped (n⁺) region 112 is deeper than source regions 108 butshallower than highly-doped (p⁺) regions 110. Gate insulating layers 116extend over channel regions 114 and highly-doped (n⁺) regions 112, andoverlap source regions 108. Gate electrode 118 extends over gateinsulating layers 116. Source electrode 120 contacts source regions 108and highly-doped (p⁺) regions 110. A drain electrode 122 contactsn⁺-type drain region 102.

In the hexagonal unit cell structure of FIGS. 1 and 2 reducing distanced between adjacent hexagonal unit cells 100 increases the channeldensity per unit area which reduces the device on-resistance. A furtherbenefit of reducing distance d is that it leads to an improvement in theswitching speed of the device. This is because reducing the distance dby reducing the spacing between adjacent body regions 106 results in areduction in the total overlap area between gate electrodes 118 andhighly doped (n⁺) regions 112. This in turn results in a reduction inthe gate to drain capacitance (Cgd) and thus an improvement in thedevice switching speed. Furthermore, a lower Cgd results in lowerswitching power loss.

Reducing the distance d however has the draw back of increasing theon-resistance of the device. This is because reducing the spacingbetween adjacent body regions 106 increases the resistance in the JFETregion (i.e., the region between base regions 106). Moreover, because ofthe relatively shallow depth of highly doped (n⁺) regions 112, reducingthe spacing between body regions 106 reduces the effectiveness of highlydoped (n⁺) regions 112 in minimizing the resistance in the JFET region.

In addition, because of the hexagonal shape of units cells 100, thedepletion region formed across the reverse-biased junction between driftregion 104 and body regions 106 has a spherical shape. This results inlower breakdown voltage. To improve the breakdown voltage, it isnecessary to increase the resistivity and/or a thickness of drift region104. However this would lead a higher on-resistance

Thus, a power device structure and method of forming the same which hasa low on-resistance, high breakdown voltage, fast switching speed, andlow switching loss is desirable.

SUMMARY

In accordance with one embodiment of the present invention, a powersemiconductor device includes a first drift region of a firstconductivity type extending over a semiconductor substrate. The firstdrift region has a lower impurity concentration than the semiconductorsubstrate. A second drift region of the first conductivity type extendsover the first drift region, and has a higher impurity concentrationthan the first drift region. A plurality of stripe-shaped body regionsof a second conductivity type are formed in an upper portion of thesecond drift region. A third region of the first conductivity type isformed in an upper portion of each body region so as to form a channelregion in each body region between the third region and the second driftregion. A gate electrode laterally extends over but is insulated from:(i) the channel region in each body region, (ii) a surface area of thesecond drift region between adjacent stripes of body regions, and (iii)a surface portion of each source region.

In one embodiment, adjacent stripes of body regions are spaced apartfrom one another by a predetermined distance such that when a reversebias is applied across the junction formed between each body region andthe second drift region a resulting depletion region has a substantiallyflat boundary in the second drift region.

In another embodiment, a frame region surrounds the plurality ofstripe-shaped body regions such that upper and lower portions of eachbody region are terminated in the frame region. The frame region has thesame conductivity type as the body regions.

In another embodiment, the second drift region has a graded impurityconcentration which reduces toward an interface between the first andsecond drift regions.

In another embodiment, the first conductivity type is n-type and thesecond conductivity type is p-type.

In another embodiment, the power semiconductor device is a MOSFET, thesemiconductor substrate is of the first conductivity type and formsMOSFET's drain contact region, and the third region forms MOSFET'ssource region.

In another embodiment, the power semiconductor device is an IGBT, thesemiconductor substrate is of the second conductivity type and formsIGBT's collector contact region, and the third region forms IGBT'semitter region.

In accordance with another embodiment of the present invention, a methodof forming a power semiconductor device is as follows. A first driftregion of a first conductivity type is formed over a semiconductorsubstrate. The first drift region has a lower impurity concentrationthan the semiconductor substrate. A second drift region of the firstconductivity type is formed over the first drift region. The seconddrift region has a higher impurity concentration than the first driftregion. A plurality of stripe-shaped body regions of a secondconductivity type are formed in an upper portion of the second driftregion. A third region of the first conductivity type in formed in anupper portion of each body region so as to form a channel region in eachbody region between the third region and the second drift region. A gateelectrode is formed which laterally extends over but is insulated from:(i) the channel region in each body region, (ii) a surface area of thesecond drift region between adjacent stripes of body regions, and (iii)a surface portion of each source region.

In one embodiment, adjacent stripes of body regions are spaced apartfrom one another by a predetermined distance such that when a reversebias is applied across the junction formed between each body region andthe second drift region a resulting depletion region has a substantiallyflat boundary in the second drift region.

In another embodiment, a frame region surrounding the plurality ofstripe-shaped body regions is formed such that upper and lower portionsof each body region are terminated in the frame region. The frame regionhas the same conductivity type as the body regions.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other features and advantages of the present inventionwill become more apparent by describing exemplary embodiments thereofwith reference to the attached drawings in which:

FIG. 1 is a layout view of a conventional power MOS field effecttransistor;

FIG. 2 is a sectional view taken along line A-A′ in FIG. 1;

FIG. 3 is a layout view of a power MOS field effect transistor accordingto an embodiment of the present invention;

FIG. 4 is a layout view showing only the frame region and body regionsof the FIG. 3 layout view;

FIG. 5 is a sectional view taken along line B-B′ in FIG. 3;

FIG. 6A is a sectional view of a power MOS field effect transistor wherea distance between adjacent body regions is relatively large;

FIG. 6B is a sectional view of a power MOS field effect transistor wherea distance between adjacent body regions is relatively small; and

FIG. 7 is a sectional view of a power semiconductor device according toanother embodiment of the present invention.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

In FIGS. 3 through 6B, like reference numerals are used to refer to likeregions, layers, or portions. FIG. 3 is a layout view of a power MOSfield effect transistor according to an embodiment of the presentinvention, and FIG. 4 is a layout view showing only the frame region andbody regions of the FIG. 3 layout view.

In FIGS. 3 and 4, a plurality of stripe-shaped cells are surrounded by aframe region 200. An upper portion and a lower portion of frame region200 are vertically connected to each other by body regions 308. That is,an upper end of the body region 308 is connected to the upper portion ofthe frame region 200, and a lower end of the body region 308 isconnected to the lower portion of the frame region 200. Body regions 308and frame region 200 are of the same conductivity type. By forming bodyregions 308 in stripes and terminating them in frame region 200, anelectric field is prevented from being concentrated at the two ends ofeach body region 308, and thus the breakdown voltage of the device isimproved. For the reasons stated above in connection with FIGS. 1-2 andmore fully explained further below, it is desirable that a spacing abetween adjacent body regions 308 be made as small as possible. Further,in one embodiment, each corner 200 c of frame region 200 has a radius ofcurvature that is greater than a predetermined value, e.g., 100 μm, sothat a spherical junction can be prevented from occurring.

In FIG. 3, gate electrodes 318 (e.g., from polysilicon) are arranged instripes such that upper and lower ends of each gate electrode 318terminate over frame region 200, and an outermost vertically extendingside of the outermost gate electrodes 318 also terminates over frameregion 200. Source electrodes 320 (e.g., from metal) are arranged instripes between adjacent gate electrodes 318. Each source regionincludes a vertically extending stripe portion 310 a and shorthorizontally extending portions 310 b. The short horizontally extendingportions 310 b electrically contact source electrodes 320.

FIG. 5 is a sectional view along line B-B′ in FIG. 3. Adrift region 304of n⁻-type conductivity extends over an n⁺-type semiconductor substrate302 which serves as the drain contact region. An additional drift region306 of n⁺-type conductivity is formed on n⁻-type drift region 304. Driftregions 804 and 806 may be epitaxially formed using conventionalmethods. Alternatively, only one epitaxially-formed drift region ofn⁻-type conductivity may be formed over substrate 302, and then then⁺-type region 306 is formed in an upper portion of theepitaxially-formed n⁻-type drift region using conventional ionimplantation methods. In one embodiment, a concentration of impuritiesin n⁺-type drift region 306 is graded and becomes smaller toward theinterface between n⁺-type drift region 306 and n⁻-type drift region 304.Body regions 308 of p⁻-type conductivity are formed in an upper portionof n⁺-type drift region 306. Source region portions 310 a (correspondingto the vertically extending stripe portions 310 a in FIG. 3) are formedin an upper portion of p⁻-type body regions 308. A highly doped region312 of p⁺-type conductivity is formed in an upper portion of each ofp⁻-type body regions 308.

Gate insulating layers 316 overlap source region potions 310 a, andextend over channel regions 314 in p⁻-type body regions 308 and overn⁺-type drift regions 306 between adjacent p⁻-type body regions 308.Gate insulating layer may be from oxide formed using conventionalmethods. Gate electrode 318 extends over gate insulating layer 316.Source electrodes 320 electrically contact highly-doped (p⁺) regions312, but do not directly contact n⁺-type source region portions 310 a.However, source electrodes 320 electrically contact n⁺-type sourceregion portions 310 a through n⁺-type source region portions 310 b (FIG.3). A drain electrode 322 electrically contacts n⁺-type drain region302. The source and drain electrodes may be from metal, and are formedusing conventional methods. Also, conventional ion implantation methodsmay be used to form body regions 308, highly-doped (p⁺) regions 312, andsource region portions 310 a, 310 b.

By using the n⁺-type drift region 306 which has a higher dopingconcentration than its underlying n⁻-type drift region 304, a loweron-resistance is obtained. This enables the width of the JFET region(i.e., the portion of n⁺-type drift region 306 between adjacent p⁻-typebody regions 308), marked in FIGS. 3 and 5 by letter a, to be reduced.The reduction in the width of the JFET region results in a reduction inthe area where gate electrode 318 extends over n⁺-type drift region 306.The reduction in the area in turn reduces the gate to source capacitance(Cgd) which helps improve the switching speed of the device. Thereduction in the width of the JFET region also helps improve the devicebreakdown voltage as described next with reference to FIGS. 6A and 6B.

FIG. 6A is a sectional view of a power MOSFET where a width b of theJFET region (i.e., the region between adjacent body regions 308) isrelatively large. FIG. 6B is a sectional view of a power MOSFET where awidth c of the JFET region is relatively small. FIGS. 6A and 6Brespectively show depletion regions 600 and 700 formed as a result of areverse bias being applied across junction J formed between drift region304 and body regions 308. In FIG. 6A, because of the relatively largewidth of the JFET region, the depletion region boundary in drift region304 has a curvature at the rounded corners of junction J as shown inencircled area 610. Because of the curvature of the depletion regionboundary, the electric field lines in these areas become crowded (asshown by the arrows in FIG. 6A). This results in a local increase inelectric field which in turn causes a reduction in the breakdown voltageof the device.

In contrast, in FIG. 6B, because the width of the JFET region isrelatively small, the boundary of depletion region 700 in drift region304 is only slightly curved as shown in encircled area 710. Thus,depletion region 700 boundary in drift region 304 has a substantiallyflat contour. This results in a more uniform electric field distributionin the drift region which in turn results in higher breakdown voltage.

Therefore, in FIG. 5, a higher breakdown voltage, faster switchingspeed, and lower R_(DSon) can be obtained by appropriately setting thewidth of the JFET region such that the depletion region boundary in thedrift region has a substantially flat contour.

FIG. 7 is a sectional view of an insulating gate bipolar transistor(IGBT) according to an embodiment of the present invention. The IGBT inFIG. 7 has a similar layout as the power MOS field effect transistor inFIG. 3. A drift region 804 of n⁻-type conductivity extends over ap⁺-type semiconductor substrate 802 which serves as the collectorcontact region. A drift region 806 of n⁺-type conductivity type extendsover n⁻-type drift region 804. In one embodiment, a concentration ofimpurities in n⁺-type drift region 806 is graded and becomes smallertoward the interface between n⁺-type drift region 806 and n⁻-type driftregion 804. Base regions 808 of p⁻-type conductivity are formed in anupper portion of n⁺-type drift region 806. Emitter regions 810 ofn⁺-type conductivity are formed in an upper portion of p⁻-type baseregions 808. Similar to the source regions in FIG. 5, emitter regions810 include laterally extending portions (no shown in FIG. 7) forcontacting emitter electrodes 820. Highly doped regions 812 of p⁺-typeconductivity are formed in an upper portion of p⁻-type base regions 808.Gate insulating layers 816 overlap source regions 810, and extend overthe channel regions in p⁻-type body regions 308 and over portions ofn⁺-type drift regions 806 between adjacent p⁻-type body regions 308.Gate electrodes 818 extend over gate insulating layers 816. Emitterelectrodes 820 electrically contact highly doped (p⁺) regions 812, andthrough laterally extending emitter region portions (not shown) contactemitter regions 810. A collector electrode 822 electrically contactsp⁺-type collector region 802.

Similar to the MOSFET in FIG. 5, the IGBT in FIG. 7 has lowon-resistance because of the n⁺-type drift region 806 which has a higherdoping concentration than its underlying n⁻-type drift region 804. Thisenables the width of the JFET region (i.e., the portion of n⁺-type driftregion 806 between adjacent p⁻-type body regions 808), marked in FIG. 7by letter a′, to be reduced. The reduction in the width of the JFETregion results in a reduction in the area where gate electrode 818extends over n⁺-type drift region 806. The reduction in the area in turnreduces the gate to emitter capacitance which helps improve theswitching speed of the device. The reduction in the width of the JFETregion also helps improve the device breakdown voltage because of thesubstantially flat contour of the depletion region boundary in the driftregion.

As described above, by forming the body regions in stripes andterminating them in the frame region, an electric field is preventedfrom being concentrated at the two ends of each body region 308, andthus the breakdown voltage of the device is improved. In addition, theswitching speed and the breakdown voltage are further improved byreducing the width of the JFET region (i.e., the portions of the driftregion between body regions) so that the depletion region boundary inthe drift region is substantially flat. Moreover, the on-resistance ofthe power semiconductor device is reduced by forming a drift regionhaving a high concentration of impurities on another drift region havinga lower concentration of impurities.

Although the invention has been described in the context of power MOSFETand IGBT devices, forming other types of power devices (for example, ap-channel MOSFET) to obtain the benefits of the present invention wouldbe obvious to one skilled in this art in view of the above teachings.

While the present invention has been particularly shown and describedwith reference to exemplary embodiments thereof, it will be understoodby those of ordinary skill in the art that various changes in form anddetails may be made therein without departing from the spirit and scopeof the present invention as defined by the following claims.

1. A method of forming a power semiconductor device, comprising: forminga first drift region of a first conductivity type over a semiconductorsubstrate, the first drift region having a lower impurity concentrationthan the semiconductor substrate; forming a second drift region of a thefirst conductivity type over the first drift region, the second driftregion having a higher impurity concentration than the first driftregion; forming a plurality of stripe-shaped body regions of a secondconductivity type in an upper portion of the second drift region;forming a third region of the first conductivity type in an upperportion of each body region so as to form a channel region in each bodyregion between the third region and the second drift region; and forminga gate electrode which laterally extends over but is insulated from: (i)the channel region in each body region, (ii) a surface area of thesecond drift region between adjacent stripes of body regions, and (iii)a surface portion of each source region.
 2. The method of claim 1wherein adjacent stripes of body regions are spaced apart from oneanother by a predetermined distance such that when a reverse bias isapplied across the junction formed between each body region and thesecond drift region a resulting depletion region has a substantiallyflat boundary in the second drift region.
 3. The method of claim 1further comprising: forming a frame region surrounding the plurality ofstripe-shaped body regions such that upper and lower portions of eachbody region are terminated in the frame region, the frame region havingthe same conductivity type as the body regions.
 4. The method of claim 1wherein the second drift region has a graded impurity concentrationwhich reduces toward an interface between the first and second driftregions.
 5. The method of claim 1 wherein the first conductivity type isn-type and the second conductivity type is p-type.
 6. The method ofclaim 1 wherein the power semiconductor device is a MOSFET, thesemiconductor substrate is of the first conductivity type and formsMOSFET's drain contact region, and the third region forms MOSFET'ssource region.
 7. The method of claim 1 wherein the power semiconductordevice is an IGBT, the semiconductor substrate is of the secondconductivity type and forms IGBT's collector contact region, and thethird region forms IGBT's emitter region.
 8. The method of claim 1wherein the gate electrode is stripe-shaped and extends parallel to theplurality of stripe-shaped body regions.
 9. The method of claim 1further comprising: forming a highly doped region of the secondconductivity type in an upper portion of each body region; forming afirst metal electrode having a stripe shape, configured to contact thethird region and the highly doped region in each body region; andforming a second metal electrode configured to contact the semiconductorsubstrate.
 10. The method of claim 1 wherein each third region includesa stripe-shaped portion extending parallel to the plurality ofstripe-shaped body regions, and a plurality of laterally extendingportions configured to contact a metal electrode.